Silane exhaust gas treatment system

Specialized in handling products generated by the semiconductor, photovoltaic, and electronics industries Silane (SiH₄) waste gas Silanes are flammable, explosive, and highly toxic; they must be properly sealed. Combustion decomposition + dust removal + multi-stage spray washing Completely harmless treatment method: exhaust gas is first... Combustion barrel The substances are fully combusted and oxidized internally, decomposing into harmless substances; then... dust collector Remove particulate matter; then proceed Combustion spray tower + spray tower Two-stage washing neutralizes and absorbs residual harmful substances; finally, through... Exhaust fan and chimney Emissions meet safety standards.

Equipment composition:

1. exhaust gas collection device
2. Combustion chamber (silane combustion decomposition unit)
3. Dust collector (dry dust collector)
4. Combustion spray tower (high-temperature washing and cooling)
5. Spray tower (deep washing and absorption)
6. Exhaust fan
7. Chimney (compliant exhaust stack)